NS series robots designed for the clean room application NS410 (arm only) with RTZ movement with optional lengths of a linear axis for an additional FOUP range. They provide high performance in the handling of 300mm wafers. The software and hardware are equipped with collision detection functions and comply with the SEMI F47 voltage exoneration standards and SEMI S2 environmental, health and safety standards.
Controller D
D controllers are designed to develop clean room applications comprising a complete digital servo process, standard Ethernet communication port, compact footprint, flexible development of different software, independent operation of two arms and multi-axis controls, uniform servo amplifiers for all axes, standards environmental, health and safety SEMI S2, white room ISO 1.
Specification of the D60 controller
- Servo complete digital system
- Controlled Axes: Maximum 7 axes
- Manual, semi-automatic, fully automatic teaching.
- External emergency stop, near security, external stop.
- Hardware: RS232C x 1 Ethernet.
- Software: K-Utility (original Kawasaki communication command for clean robots).
- Energy: Voltage: Single-phase, AC208 V ± 10%, 50/60 Hz. Standard: SEMI F47.
- Input signal: Maximum 16 channels.
- Output signal: Maximum of 8 channels
- Compatible robots series: NS, NT, NX, TT, TX and NV
Specification of the D61 controller
- Servo complete digital system
- Controlled Axes: Maximum 12 axes
- Manual, semi-automatic, fully automatic teaching.
- External emergency stop, near security, external stop.
- Hardware: RS232C x 2 Ethernet.
- Software: K-Utility (original Kawasaki communication command for clean robots).
- Energy: Voltage: Single-phase, AC208 V ± 10%, 50/60 Hz. Standard: SEMI F47.
- Input signal: Maximum 96 channels
- Output signal: Maximum of 80 channels
- Compatible robots series: NS, NT, NX, TT, TX and NV
Main specifications
Number of axis: 3
ISO Class 2
Repeatability: ± 0.1 mm (wafer center)
Controller: D60/D61
Motion range (°)
Y axis (travel JT1): 2 FOUP: 660 mm / 3 FOUP: 1,070 mm / 4 FOUP: 1,670 mm
θ axis (rotation JT2): 380 °
Z axis (up-down JT3): 380 mm
X axis (up-down JT4): 710 mm
F axis (rotation JT5): -
Robot applications
Cleanroom
