The NX520 with 2 links, rigid double arm structure that can easily reach the wafer stages with a high performance space of 200 wafers per hour (WPH) from FOUP to the aligner, and then to the stage with a double arm manipulator, meets the standards of ISO Class 1, standard SEMI-F47 system of immediate solution to the voltage drop and restart of the automatic system when voltage is restored, standard SEMI-S2 environmental protection, personal safety, anti-collision system.
Controller D
D controllers are designed to develop clean room applications comprising a complete digital servo process, standard Ethernet communication port, compact footprint, flexible development of different software, independent operation of two arms and multi-axis controls, uniform servo amplifiers for all axes, standards environmental, health and safety SEMI S2, white room ISO 1.
Specification of the D60 controller
- Servo complete digital system
- Controlled Axes: Maximum 7 axes
- Manual, semi-automatic, fully automatic teaching.
- External emergency stop, near security, external stop.
- Hardware: RS232C x 1 Ethernet.
- Software: K-Utility (original Kawasaki communication command for clean robots).
- Energy: Voltage: Single-phase, AC208 V ± 10%, 50/60 Hz. Standard: SEMI F47.
- Input signal: Maximum 16 channels.
- Output signal: Maximum of 8 channels
- Compatible robots series: NS, NT, NX, TT, TX and NV
Specification of the D61 controller
- Servo complete digital system
- Controlled Axes: Maximum 12 axes
- Manual, semi-automatic, fully automatic teaching.
- External emergency stop, near security, external stop.
- Hardware: RS232C x 2 Ethernet.
- Software: K-Utility (original Kawasaki communication command for clean robots).
- Energy: Voltage: Single-phase, AC208 V ± 10%, 50/60 Hz. Standard: SEMI F47.
- Input signal: Maximum 96 channels
- Output signal: Maximum of 80 channels
- Compatible robots series: NS, NT, NX, TT, TX and NV
Main specifications
Number of axis: 5
ISO Class 1
Link: 2
Repeatability: ± 0.1 mm (wafer center)
Controller: D60/D61
Motion range (°)
θ axis
(rotation JT2) |
330° |
| 440 mm |
Z axis
(up-down JT3) |
832 mm |
| 336° |
X axis
(in/out JT4) |
|
W axis - lower
(rotation JT6) |
336 ° |
W axis - upper
(rotation JT7) |
|
Robot applications
Cleanroom
